Study of toxic gas adsorption on silicon substrate integrated with piezoelectric material for sensing application using COMSOL Multiphysics
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چکیده
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ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2021
ISSN: 1757-899X
DOI: 10.1088/1757-899x/1070/1/012003